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Quantitative scanning probe microscope topographies by charge linearization of the vertical actuator

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posted on 2025-05-09, 23:22 authored by Andrew FlemingAndrew Fleming
Many forms of scanning probe microscopy require a piezoelectric actuator to vary the probe-sample distance. Examples include constant-force atomic force microscopy and constant-current scanning tunneling microscopy. In such modes, the topography of the sample is reconstructed from the voltage applied to the vertical piezoelectric actuator. However, piezoelectric actuators exhibit significant hysteresis which can produce up to 14% uncertainty in the reproduced topography. In this work, a charge drive is used to linearize the vertical piezoelectric actuator which reduces the error from 14% to 0.65%.

History

Journal title

Review of Scientific Instruments

Volume

81

Issue

10

Pagination

103701-1-103701-4

Publisher

American Institute of Physics

Place published

Melville, NY

Language

  • en, English

College/Research Centre

Faculty of Engineering and Built Environment

School

School of Electrical Engineering and Computer Science

Rights statement

© American Institute of Physics

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