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Note: Guaranteed collocated multimode control of an atomic force microscope cantilever using on-chip piezoelectric actuation and sensing

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posted on 2025-05-11, 13:11 authored by Michael G. Ruppert, Yuen Kuan YongYuen Kuan Yong
The quality (Q) factor is an important parameter of the resonance of the microcantilever as it determines both imaging bandwidth and force sensitivity. The ability to control the Q factor of multiple modes is believed to be of great benefit for atomic force microscopy techniques involving multiple eigenmodes. In this paper, we propose a novel cantilever design employing multiple piezoelectric transducers which are used for separated actuation and sensing, leading to guaranteed collocation of the first eight eigenmodes up to 3 MHz. The design minimizes the feedthrough usually observed with these systems by incorporating a guard trace on the cantilever chip. As a result, a multimode Q controller is demonstrated to be able to modify the quality factor of the first two eigenmodes over up to four orders of magnitude without sacrificing robust stability.

History

Journal title

Review of Scientific Instruments

Volume

88

Issue

15 August 2017

Article number

86109

Publisher

AIP Publishing

Language

  • en, English

College/Research Centre

Faculty of Engineering and Built Environment

School

School of Electrical Engineering and Computer Science

Rights statement

© 2017 AIP. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in Michael G. Ruppert, Yuen K. Yong, (2017) 'Note: Guaranteed collocated multimode control of an atomic force microscope cantilever using on-chip piezoelectric actuation and sensing', Review of Scientific Instruments 2017 88:8 and may be found at http://dx.doi.org/10.1063/1.4990451.