This Note describes a new technique for estimating the resolution of nanopositioning systems. By recording the voltage applied to an actuator and performing a filtering operation, the position noise and resolution can be estimated. This technique is simple to apply in practice and does not require any additional sensors or specialized equipment.
History
Journal title
Review of Scientific Instruments
Volume
83
Issue
8
Publisher
American Institute of Physics
Language
en, English
College/Research Centre
Faculty of Engineering and Built Environment
School
School of Electrical Engineering and Computer Science