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Note: A method for estimating the resolution of nanopositioning systems

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journal contribution
posted on 2025-05-11, 08:59 authored by Andrew FlemingAndrew Fleming
This Note describes a new technique for estimating the resolution of nanopositioning systems. By recording the voltage applied to an actuator and performing a filtering operation, the position noise and resolution can be estimated. This technique is simple to apply in practice and does not require any additional sensors or specialized equipment.

History

Journal title

Review of Scientific Instruments

Volume

83

Issue

8

Publisher

American Institute of Physics

Language

  • en, English

College/Research Centre

Faculty of Engineering and Built Environment

School

School of Electrical Engineering and Computer Science

Rights statement

© American Institute of Physics

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