Mapping chemical concentration in binary thin organic films via multi-wavelength scanning absorption microscopy (MWSAM)

The composition and thickness of binary thin organic films is determined by measuring the optical absorption at multiple wavelengths across the film surface and performing a component analysis fit to absorption standards for the materials. The multiple laser wavelengths are focused onto the surface using microscope objectives and raster scanned across the film surface using a piezo-electric actuator X–Y stage. All of the wavelengths are scanned simultaneously with a frequency division multiplexing system used to separate the individual wavelength response. The composition values are in good quantitative agreement with measurements obtained by scanning transmission x-ray microscopy (STXM). This new characterization technique extends quantitative compositional mapping of thin films to thickness regimes beyond that accessible by STXM.