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Erratum: investigation of the photochemistry of the poly {p-phenylenevinylene} precursor system: implications for nanolithography [J. Chem. Phys. 126, 174703 (2007)]

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posted on 2025-05-11, 18:23 authored by D. V. Cotton, C. J. Fell, Warwick BelcherWarwick Belcher, M. Tachiya, Paul DastoorPaul Dastoor
The photochemistry of the poly{p-phenylenevinylene} precursor system was investigated. The original model for precursor insolubilization did not account for the fact that the number of precursor sites is a function of the dose received. The number of precursor sites converted per unit time at time is proportional to the number of unconverted precursor sites remaining at time and the dose rate. Profilometer data show that under atmospheric conditions T is a maximum. The threshold dose for the atmospheric data will always be greater than that for the precursor irradiated in nitrogen because precursor sites may be oxidized as soon as they have been insolubilized, and hence it takes longer to achieve the threshold of sites required for insolubilization of the polymer.

History

Journal title

Journal of Chemical Physics

Volume

128

Issue

4

Publisher

American Institute of Physics

Language

  • en, English

College/Research Centre

Faculty of Science and Information Technology

School

School of Mathematical and Physical Sciences

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