posted on 2025-05-11, 09:07authored byMichael G. Ruppert, S. O. Reza Moheimani
This work proposes a novel self-sensing tapping-mode atomic force microscopy operation utilizing charge measurement. A microcantilever coated with a single piezoelectric layer is simultaneously used for actuation and deflection sensing. The cantilever can be batch fabricated with existing micro electro mechanical system processes. The setup enables the omission of the optical beam deflection technique which is commonly used to measure the cantilever oscillation amplitude. Due to the high amount of capacitive feedthrough in the measured charge signal, a feedforward control technique is employed to increase the dynamic range from less than 1 dB to approximately 35 dB. Experiments show that the conditioned charge signal achieves excellent signal-to-noise ratio and can therefore be used as a feedback signal for atomic force microscopy imaging.
History
Journal title
Review of Scientific Instruments
Volume
84
Issue
12
Publisher
American Institute of Physics
Language
en, English
College/Research Centre
Faculty of Engineering and Built Environment
School
School of Electrical Engineering and Computer Science