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A micromachined nanopositioner with on-chip electrothermal actuation and sensing

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posted on 2025-05-09, 06:28 authored by Y. Zhu, A. Bazaei, S. O. R. Moheimani, M. R. Yuce
This letter describes the design of a micromachined nanopositioner with thermal actuation and sensing capabilities in a single chip. The positioner has a dynamic range of 14.4 μm, and the sensor drift is 8.9 nm over 2000 s with a differential sensing scheme. The on-chip displacement sensing enables a feedback control capability. A proportional–integral feedback controller is designed and implemented digitally. The closed-loop step response results show a positioning resolution of 7.9 nm and a time constant of 1.6 ms.

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Related Materials

  1. 1.
    DOI - Is published in https://doi.org/10.1109/led.2010.2058841
  2. 2.
    ISSN - Is version of https://portal.issn.org/resource/ISSN/0741-3106

Journal title

IEEE Electron Device Letters

Volume

31

Issue

10

Pagination

1161-1163

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Language

  • en, English

College/Research Centre

Faculty of Engineering and Built Environment

School

School of Electrical Engineering and Computer Science

Rights statement

Copyright © 2010 IEEE. Reprinted from IEEE Electron Device Letters Vol. 31, Issue 10, p. 1161-1163. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of the University of Newcastle's products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. By choosing to view this document, you agree to all provisions of the copyright laws protecting it.

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    Keywords

    feedback controlmicroelectromechanical systems (MEMS)nanopositioningthermal actuationthermal position sensing

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