Frequencies of principal divisor ranks of the first trillion positive integers grouped in millions

Entry f_r_by_M[r,M] is the count of those integers in the range [(M-1)*10^6 + 1 .. M*10^6] with principal divisor rank r. We list f_r_by_M[r,M] for r in [1..11] and M in [1..10^6]. Implicitly, we have: f_r_by_M[0,1] eq 1 (the integer 1 uniquely has principal divisor rank 0), and f_r_by_M[0,M] eq 0 for every M gt 1.